|
|
etch Best among non-ALD samples. Curves have hysteresis, shift towards left after 5 cycles. Vth ranges [-3V;-1V]. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 1 | -9.6 | 6.55 | -1.09 | 6.17 | 0.38 |
| 2 | -9.2 | 7.67 | -1.07 | 5.80 | 0.45 |
| 3 | -9.7 | 6.52 | -1.31 | 5.26 | 0.82 |
| 4 | -9.4 | 6.15 | -1.07 | 5.60 | 0.48 |
| 5 | -9.6 | 6.36 | -1.11 | 5.33 | 0.52 |
| 6 | -9.7 | 4.46 | -1.49 | 4.09 | 1.26 |
| 7 | -9.9 | 3.30 | -0.95 | 5.31 | 1.20 |
| 8 | -9.2 | 3.44 | -0.44 | 4.80 | 1.12 |
| 9 | -9.6 | 6.62 | -1.16 | 5.32 | 0.45 |
|
|
lo Curves have hysteresis, shift towards left after 5 cycles. Vth ranges [-3V;-1V]. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 2 | -9.0 | 6.61 | -2.58 | 4.81 | 0.26 |
| 3 | -10.1 | 7.62 | -1.45 | 4.92 | 0.18 |
| 4 | -10.0 | 6.88 | -1.69 | 5.99 | 0.25 |
| 6 | -10.0 | 6.21 | -2.03 | 1.70 | 0.50 |
| 7 | -9.9 | 2.45 | -1.54 | 5.62 | 1.72 |
| 8 | -9.9 | 2.29 | -2.08 | 3.64 | 1.73 |
| 9 | -10.1 | 7.55 | -0.97 | 4.52 | 0.22 |
|
|
etch1g Curves have hysteresis, shift towards left after 5 cycles. Vth ranges [-3V;-1V]. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 1 | -10.2 | 6.51 | -2.20 | 3.83 | 0.21 |
| 2 | -9.8 | 6.55 | -1.79 | 6.48 | 0.55 |
| 3 | -5.6 | 5.25 | -1.83 | 6.25 | 0.69 |
| 4 | -10.3 | 6.46 | -1.28 | 4.78 | 0.58 |
| 5 | -10.2 | 6.42 | -1.71 | 4.28 | 0.63 |
| 6 | -9.4 | 6.60 | -1.98 | 6.18 | 0.47 |
| 9 | -10.3 | 6.65 | -1.81 | 5.69 | 0.50 |
|
|
lo1g Only 3 out of 9 working. Curves have hysteresis, shift towards left after 5 cycles. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 3 | -9.4 | 7.50 | -0.40 | 4.44 | 0.15 |
| 4 | -9.9 | 6.96 | -1.30 | 5.14 | 0.32 |
| 7 | -10.1 | 3.98 | -1.83 | 4.31 | 1.27 |
| 9 | -10.3 | 6.61 | -1.04 | 4.79 | 0.37 |
|
|
etch2g Curves have hysteresis (stronger than lo2g), shift towards left after 5 cycles. Vth ranges [-3V;-1V]. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 2 | -9.9 | 7.19 | -1.48 | 5.90 | 0.37 |
| 3 | -9.6 | 6.54 | -0.64 | 5.71 | 0.46 |
| 4 | -10.3 | 6.60 | -1.77 | 5.62 | 0.39 |
| 5 | -10.2 | 6.38 | -3.04 | 2.74 | 0.48 |
| 6 | -9.9 | 7.67 | -1.39 | 5.41 | 0.41 |
| 8 | -10.2 | 6.86 | -1.55 | 5.04 | 0.42 |
| 9 | -10.3 | 6.97 | -1.44 | 5.22 | 0.18 |
|
|
lo2g Curves have hysteresis, shift towards left after 5 cycles. Vth ranges [-5V;-1V]. |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 1 | -9.9 | 6.71 | -4.35 | 4.83 | 0.48 |
| 2 | -10.3 | 7.63 | -1.64 | 4.64 | 0.91 |
| 3 | -10.3 | 6.58 | -1.70 | 4.27 | 0.42 |
| 4 | -10.1 | 6.54 | -2.25 | 3.79 | 0.45 |
| 5 | -10.1 | 5.65 | -3.02 | 3.57 | 1.13 |
| 7 | -10.0 | 7.66 | -1.68 | 5.05 | 0.43 |
| 8 | -9.8 | 6.66 | -2.43 | 5.01 | 0.33 |
|
|
ALDetch Less reproducible than ALDlo, devices 2 (broken, high leakage) and 3 differ from other samples. Vth around -2V, stable after 5 measurement cycles. I_off higher than other samples (stronger leakage). |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 2 | -1.5 | 2.64 | -1.58 | 1.66 | 0.56 |
| 3 | -9.4 | 5.13 | -0.66 | 4.75 | 0.27 |
| 5 | -9.7 | 3.28 | -1.85 | 7.90 | 0.23 |
| 6 | -10.2 | 2.70 | -2.05 | 8.31 | 0.31 |
| 7 | -10.0 | 4.25 | -1.50 | 8.11 | 0.27 |
| 8 | -10.1 | 3.53 | -1.73 | 8.20 | 0.32 |
| 9 | -10.0 | 2.79 | -2.00 | 8.35 | 0.31 |
|
|
ALDlo Highest reproducibility. Vth approximaltely = 0V, stable after 5 measurement cycles. I_off higher than other samples (stronger leakage). |
|---|
| Pixel | log10 Leakage [A] | On-Off | V threshold [V] | Mobility [cm^2/(V*s)] | Subthreshold slope [V/dec] |
|---|---|---|---|---|---|
| 1 | -10.3 | 5.31 | -0.38 | 6.85 | 0.17 |
| 3 | -6.3 | 5.17 | -0.37 | 7.62 | 0.06 |
| 4 | -10.5 | 5.37 | -0.19 | 6.93 | 0.18 |
| 5 | -10.3 | 5.30 | -0.42 | 7.80 | 0.19 |
| 6 | -10.4 | 5.02 | -0.14 | 7.82 | 0.23 |
| 7 | -10.4 | 5.28 | -0.34 | 7.40 | 0.20 |
| 8 | -10.3 | 5.04 | -0.31 | 7.90 | 0.20 |
| 9 | -10.4 | 5.31 | -0.31 | 8.44 | 0.20 |
|
lo |
etch |
|
lo1g |
etch1g |
|
lo2g |
etch2g |
|
ALDlo |
ALDetch |